PURITY // 01
YIELD STABILITY REVIEW
CHAPTER 03 / SHIFT HANDOFFS
07
INSIGHT / PARTICLE CONTROL
Process drift starts on the overnight shift.
Particle excursions by shift handoff
Particle excursions per ten thousand wafer starts rise from 18 at 06:00 to 58 at 02:00.
PARTICLE EXCURSIONS / 10K WAFER STARTS
Q4 2024 · FAB 03
60
40
20
0
18
23
27
35
47
58
06:00
10:00
14:00
18:00
22:00
02:00
NIGHT WINDOW
SHIFT HANDOFF
HIGHER = MORE EXCURSIONS
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